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PhD Final Oral Examination – John M. McGlone


Monday, March 20, 2017 1:00 PM - 3:00 PM

Development of Amorphous Metal Thin Films for Thermal Inkjet Printing
Due to a lack of grain boundaries, an amorphous metal thin film (AMTF) possesses advantageous mechanical properties and enhanced chemical stability that is potentially useful for thermal inkjet (TIJ) printing applications. The use of an AMTF as a TIJ resistor or cavitation plate could lead to a thinner TIJ cavitation plate and improved thermal performance. However, if an AMTF is to be used as in a TIJ application, it must remain amorphous during TIJ operation. Six new Ta-based AMTFs are investigated and are found to remain amorphous up to temperatures in excess of 600 °C. AMTFs prepared using a sputter target composition of Ta30W30Si40 possess the highest thermal stability, remaining amorphous to a temperature of 1000 to 1100 °C in vacuum. Additionally, this AMTF forms a stable surface oxide when annealed in oxygen up to 700 °C. To demonstrate TIJ feasibility, Ta30W30Si40 resistors are fabricated and stressed in an open-pool test bed. Ta30W30Si40 AMTFs remain amorphous after testing to > 107 pulses. This suggests that Ta30W30Si40 is a promising AMTF candidate material for TIJ applications. Ta-based AMTFs are also employed as bottom electrodes in metal-insulator-metal tunnel diodes in order to demonstrate their potential for microelectronic applications.

Major Advisor: John F. Wager
Committee: Douglas A. Keszler
Committee: Alan X. Wang
Committee: John F. Conley
GCR: Oksana G. Ostroverkhova


Kelley Engineering Center (campus map)
1007
Calvin Hughes
1 541 737 3617
Calvin.Hughes at oregonstate.edu
Sch Elect Engr/Comp Sci
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