Oregon State University

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Event Details

PhD Final Oral Examination – Ken Hoshino

Monday, June 11, 2012 2:00 PM - 4:00 PM

Fabrication Process Assessment and Negative Bias Illumination Stress Study of IGZO and ZTO TFTs
Indium-gallium-zinc oxide (IGZO) and zinc-tin oxide (ZTO) are investigated for thin-film transistor (TFT) applications. Negative bias illumination stress (NBIS) is employed for electrical stability assessment. Unpassivated IGZO and ZTO TFTs suffer from severe NBIS instabilities. Zinc-tin-silicon oxide is found to be an effective passivation layer for IGZO and ZTO TFTs, significantly improving the NBIS stability. NBIS instabilities in unpassivated TFTs are attributed to an NBIS-induced desorption of chemisorbed oxygen from the channel layer top surface, exposing surface oxygen vacancies. A ZTSO layer protects the channel layer top surface from adsorbed gas interactions and also appears to reduce the density of oxygen vacancies. The best device architectures investigated with respect to TFT electrical performance are found to be staggered with aluminum electrodes for unpassivated TFTs and coplanar with ITO electrodes for ZTSO-passivated TFTs. Annealing in wet-O2 is not found to be effective for improving the performance of IGZO or ZTO TFTs or for reducing the post-deposition annealing temperature.

Major Advisor: John Wager
Committee: John Conley
Committee: Albrecht Jander
Committee: Douglas Keszler
GCR: David Hackleman

Kelley Engineering Center (campus map)
Shannon Thompson
1 541 737 7234
shannon.thompson at oregonstate.edu
Sch Elect Engr/Comp Sci
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