Oregon State University

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PhD Oral Preliminary Examination – Sean Smith


Wednesday, November 13, 2013 2:00 PM - 4:00 PM

Processing Property Relationships in Oxide Thin Films
The processing property relationship in three oxide thin film systems will be explored.

Thin atomic layer deposition (ALD) Al2O3 films increase the thermal degradation resistance of cellulose nanocrystal (CNC) fibers providing an avenue to incorporate them into polymers with higher melt temperatures as a reinforcing fiber. A novel aerogel microstructure is used to provide an open framework of fibers allowing for a conformal ALD coating.

Prompt inorganic condensation (PIC) is a solution based route to thin oxide films via metal-hydroxide clusters in an aqueous solution that offers a potential route to high density films with atmospheric processing and modest annealing requirements. Preliminary results of Al2O3 films deposited by PIC will be compared against Al2O3 films via ALD relating differences in electrical properties, structure and processing.  Plans for further characterizing and optimizing the PIC Al2O3 system will be presented.

Amorphous Indium Gallium Zinc Oxide (a-IGZO) is a promising transparent semiconductor used in backplane thin film transistors for displays.  Combinatorial studies of vacuum processed a-IGZO have shown in rich compositions to have hall mobilities of up to 50 cm2/Vs. Work will be outlined to attempt to achieve similar results using PIC a-IGZO TFTs with PIC Al2O3 dielectrics.

Major Advisor: John F. Conley Jr.
Committee: Brady Gibbons
Committee: Greg Herman
Committee: Douglas Keszler
GCR: David Roundy 


Kelley Engineering Center (campus map)
1007
Nicole Thompson
1 541 737 3617
Nicole.Thompson at oregonstate.edu
Sch Elect Engr/Comp Sci
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